<thead id="93zme"><kbd id="93zme"><nobr id="93zme"></nobr></kbd></thead>

<tbody id="93zme"><pre id="93zme"></pre></tbody>

    <ol id="93zme"></ol>
  • <tbody id="93zme"><p id="93zme"></p></tbody>
    <tbody id="93zme"></tbody>
    <th id="93zme"></th>
    <tbody id="93zme"><pre id="93zme"></pre></tbody>

    Combinational optical rule check on hotspot detection

    White Paper

     

    The Calibre OPCverify tool can use additional limiters such as max intensity, contrast, and NILS checks in combination with normal CD-based checks such as bridge, pinch, or process window bands to achieve higher accuracy in failure locations.

    Finding the true on-product hot spots (patterning defects) by high volume manufacturing inspection tools is increasingly challenging. Using optical rule checks is common, but may not be good enough. We propose a method of using addition limiters to achieve higher accuracy.

    Go URL
    This Go URL can be used to navigate to this page. It is easier to copy and paste in an email than the long URL.

    Related Resources

    久久视热频国产这里只有精品23_久久热视频_青草青草久热精品视频_九九色视频在线观看视频在线
    Chat | Contact