A novel processing platform for post tape out flows

As the computational requirements for post tape out (PTO) flows increase, computational tools need to scale as well. Using design hierarchy helps, but as the data is processed through the PTO flow, its...

Reduction of systematic defects with machine learning from design to fab

This paper presents machine learning and computational lithography methods to identify and eliminate yield limiting patterns in the design, improve the accuracy of mask generation with etch and resist modeling...

Mask process correction validation for multi-beam mask lithography

In this paper, we present a full cycle of MPC calibration and verification, using existing, proven mask processes in combination with a novel MBMW system.

Automatic classification of patterned mask defects

Patterned masks require requalification at wafer fabrication plants to find and fix defects that can develop over time. Unavailability of layout data complicates the tasks of identifying different pattern...

Combinational optical rule check on hotspot detection

Machine-learning based wafer defect detection

Failing to detect yield-killer defects could be due to the lack of sufficient understanding and modeling in terms of etching, CMP, as well as other inter-layer process variations. In this paper, we present...

Calibre semi manufacturing solutions

By providing solutions for fast ramp, maximizing process yield and predicting, preventing and rapidly addressing manufacturing challenges through the entire technology node life cycle.

Calibre fab solutions

Calibre Yield engineering solutions bring together data sources from across the design to fab ecosystem to enable advanced yield diagnostics, root cause analysis, and proactive design and process guidance.

Proving predictive design and process insights

The success of ramping a new product manufacturing depends on many factors. Calibre tools use ML-based layout analysis techniques enable the efficient connection of design and manufacturing information...